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Mittwoch, 28. Februar 2018, 10:50

In Situ Particle Monitoring

I work in vacuum coating, but not in the semiconductor industry. I'm hoping someone may be able to help out. I am looking for an in situ particle monitor for a vacumm system. Particles pass through the opening and scatter the laser beam.
A bit of research shows that High Yield Technology (HYT) is something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc). But HYT has been bought so many times since then, if anyone stills makes that product. Inficon also makes a laser vacuum particle detector called Stiletto. I want to hear about their system, but it's not exactly what I want it to be in pumping lines.
Are there other options out of their I'm missing? What does the semiconductor industry use for in situ particle monitoring?

Any help appreciated.

I did not find the right solution from the internet.

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Dieser Beitrag wurde bereits 1 mal editiert, zuletzt von »Rayancaleb« (10. März 2018, 09:53)