I work in vacuum coating, but not in the semiconductor industry. I'm hoping someone may be able to help out. I am looking for an in situ particle monitor for a vacumm system. Particles pass through the opening and scatter the laser beam.
A bit of research shows that High Yield Technology (HYT) is something exactly like what I want (HYT Model 10, Model 20, Model 25SX etc). But HYT has been bought so many times since then, if anyone stills makes that product. Inficon also makes a laser vacuum particle detector called Stiletto. I want to hear about their system, but it's not exactly what I want it to be in pumping lines.
Are there other options out of their I'm missing? What does the semiconductor industry use for in situ particle monitoring?
Any help appreciated.
I did not find the right solution from the internet.
reference:
http://www.eng-tips.com/viewthr/55444
Cloud Service Video
Thanks!